Measures 0.1 µm Particles in Photoresist, SOG and other solutions
Optical systemLight-scattering methodLight sourceDiode pumped solid state laser (wavelength: 532 nm, rated output 500 mW)Materials of parts exposed to sample fluidSynthetic quartz, PFAMeasurement size range5 channels (Factory default): ≥0.1 µm, ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm Setting range 0.1 µm to 0.5 µmFlow rate5 mL/minMaximum particle number concentration9,600 particles/mL (coincidence loss 10%)Power requirementsDC 12 V (Supplied by KE-40B1)DimensionsApprox. 164 (H) x 464 (W) x 305 (D) mm (excl. protruding parts)WeightApprox. 12.5 kgShare