Ideal for Monitoring 0.15 µm Particles in Photoresist, SOG, and Other Solutions
Optical systemLight-scattering methodLight sourceLaser diode (wavelength: 830 nm, rated output 200 mW)Materials of parts exposed to sample fluidSynthetic quartz, PFAMeasurement size range4 channels (Factory default): ≥0.15 µm, ≥0.2 µm, ≥0.3 µm, ≥0.5 µm Setting range 0.15 µm to 0.5 µmFlow rate10 mL/minMaximum particle number concentration1,200 particles/mL (coincidence loss 5%)Power requirementsDC 12 V (Supplied by KE-40B1)DimensionsApprox. 160 (H) x 300 (W) x 251 (D) mmWeightApprox. 7.5 kgShare